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Sheet Resistance Measurement
The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.
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20J3 SHEET RESISTANCE METER
Non-contact measurement of Ohms/sq, Ohms-cm, resistivity, thickness, and moreMeasures nearly all thin conductive materials or coatingsChoose a sensor in one of four ranges, from .005 Ohms/sq to 100,000 Ohms/sqadd other sensors laterFor benchtop or inline applicationsSimple one-button operationSmall footprint with detached sensor probeOptions include vacuum-ready probe, PC-based productivity software, Ethernet connectivity, stage, and more
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ITO Sheet Resistance Standards (ITOSRS)
Indium Tin Oxide Sheet Resistance Standards (ITOSRS) from VLSI Standards are NIST-traceable products, intended for calibration of both contact and non-contact sheet resistance measurement tools used in the LCD, flat panel and touch-screen markets.
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Non-contact Sheet Resistance /resistivity Measurement Instrument
EC-80
*Easy operation and compact design*Auto-measurement start by inserting a wafer under the probe*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range
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Non-contact Ultra-High Range Sheet Resistance Measurement System
CRN-100
*Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting*Mapping program software;*1. Arranged in a multipoint pattern measurement is programmed*2. 2-D & 3-D mapping software*Easy operation by Windows 7 system software*Measurement data base link with Excel via CSV format file*Unaffected by contact resistance
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Non-contact Sheet Resistance Multi-points Measurement System With Wide Range
NC-80MAP
*Possible to measure wide range of sheet resistance by installing Max. 4 probes*Min. 7 mm position from edge can be measured*User programable measurement pattern & programmable measuring pattern
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Non-contact Inline Sheet Resistance Measurement Module For Flat Panel Display
NC-600
*Non-stop and non-contact sheet resistance measuring of thin film on glass runs through on conveyer*1 to 10 number of probe by sizes of glass is attachable*Glass collision prevention function*Continuous test data report to the host computer
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Non-Contact (Pulse-Voltage Excitation Method) Ultra-Low Sheet Resistance Measurement System
PVE-80
*No damage measurement by non-contact Pulse-Voltage excitation method*Easy to measure & carry around, Removable stage plate*Easy operation and data processing by PC with Software*Measurement result can shown by 3 types of measurement unit (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])*Pulse-Voltage excitation method : Pat. No.5386394 Joint development with Chiba Univ.
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Non-contact Inline Sheet Resistance Measurement Module For Conductive Layer On Substrate
NC-700
*Inline measurement module for moving substrates such as PET film, glass or paper*Continuous measurement(~24h) in Roll to Roll with OFF-SET FREE capability system*Various applications from the research and development to the production line
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Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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Fully Automatic 4 Point Probe Sheet Resistance System For Semiconductor Process Evaluate
WS-3000
*Automatic probe head selection(exchanger) among 4 kinds of probe head*[No need to exchange a probe head by each different sample measurement]*Edge 1mm measurement is available by dual meas. mode*High cost performance from high speed measurement*FOUP compatible, GEM / SECS compatible
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Global Standard Model For 4 Point Probe Sheet Resistance Automatic Measurement System
RT-3000/RG-1000F
*Fully automatic system for large sizes of flat panel with glass loading robot*Tester self-test function, Measurement position correction function, wide measurement range*Min. 0.1 mm meas. resolution and user programmable test pattern*Host (CIM) communication and 2-D/3-D Mapping software
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Hand Held Sheet Resistance Measurement Instrument[Replaceable Probe Set (Non-destructive Probe & Contact Probe) ]
DUORES
Easy to measure sheet resistance & carry aroundReplaceable hand-held probes for Non-destructive & Contact type
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microRSP
M200
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Contactless Wafer Gauge for Resistivity, Thickness
MX 60x
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
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Film Impact Tester
DRK136B
Shandong Drick Instruments Co., Ltd.
DRK136B Film Impact Tester is applicable in the precise impact resistance test of plastic films, sheets, laminated films, rubber and other nonmetal material.
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Film Impact Tester
DRK136A
Shandong Drick Instruments Co., Ltd.
DRK136A Film Impact Tester is applicable in the precise impact resistance test of plastic films, sheets, laminated films, rubber and other nonmetal material.
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Falling Dart Impact Tester
SKZ148
Dart impact testing machine used for plastic films and sheets of impact test to evaluate the impact resistance, it adopts background light source for test results.
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4-Probe Resistivity and Resistance Tester
HS-MPRT-5
t used for measuring resistivity of silicon rods and wafers, and sheet resistance of diffused layers, epitaxial layers, LTO conductive films and conductive rubbers, etc.
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Drop Dart Impact Tester
Qualitest offers a Drop Dart Impact Tester which is simple to use as a stand-alone, non-instrumented tester. It is used to measure impact resistance of film, sheet, and laminated materials.
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Impact Testers
For impact resistance testing of plastic film, sheet, and laminated materials, a specific weight is dropped from a specific height onto a firmly held sample to determine a 50% failure rate.
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Non-contact Inline Resistivity Measurement Module
NC-110 (NC-110PV)
*Possible to measure sheet resistance without contact by Max. 3 types of probes*Suitable for production line and tranceportation system*Connect to host PC by LAN to send measurement command and data
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Hand Held Probe Type Eddy Current Sheet Resistance/resistivity Measurement Instrument
EC-80P (Portable)
*Auto-measurement start by probe head contacting to sample*3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range*Resistivity probe can be changed by sample’s resistivity range
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Multi-Test Resistivity Measurement System
Sheet resistance mapping of thin films with a collinear 4-point probe, Temperature co-efficient of resistance (TCR) of thin films with collinear 4-point probe, Precision temperature co-efficient of resistance (TCR) with 2-point Kelvin probes and precision surface temperature probe, resistor testing with 2-point Kelvin probes,Precision resistor testing with a Kelvin probe card, temperature co-efficient of resistance resistor test (TCR), and Standard TCR test of multiple resistors with Kelvin probes or a probe card.
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DIN Abrasion Tester
Sataton Instruments Technology CO., Ltd
DIN abrasion tester basing on the rotating cylindrical drum is to determine the volume loss and abrasion resistance index due to the abrasion action of rubbing a specimen over a specified abrasive. It is the recommended testing machine to evaluate for abrasion resistance of rubber, vulcanized or thermoplastic materials. The tester includes a laterally movable specimen holder and a rotatable cylinder with abrasive sheet fixed can provide two testing methods, non-rotatable specimen test and rotating test piece.
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Physical Test Equipment
When assessing a coating for suitability for a particular application the testing of the physical properties such as bendability, impact resistance, hardness, washability and abrasion resistance are all required to provide information for decision making. Testing of the pigments using fineness of grind gauges, determining the specific gravity of the coating using density cups, measuring the viscosity using viscosity cups or rotational viscometers and assessing the drying time all provide information for the coating technical data sheets.
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microRSP
M300
The semi-automatic microRSP-M300 by CAPRES A/S is a unique R&D tool for sheet resistance measurements of conductive surfaces in micro scale. Like the automatic microRSP by CAPRES A/S the semi-automatic microRSP makes use of the micro 4 point probe characterised by having a probe pitch of 1000 times smaller pin spacing/pitch than that of conventional probes.
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Needle Four Point Probe
Our four point probes measure the sheet resistance / resistivity / thickness of a wide variety of materials including group-IV semiconductors, metals, and compound semiconductors, as well as new materials found in flat panel displays and hard disks. We offer a wide range of models, options, and probe heads to suit your materials', measurement, and budget needs.
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Wide Measurement Range Model Of Semi-automatic 4 Point Probe Sheet Resistance/resistivity Measurement
RT-3000/RG-2000 (RG-3000)
*User programable measurement pattern & programmable measuring pattern*Tester self-test function, wide measuring range*Thickness, edge, temperature correction for silicon wafer*Film thickness conversion function from sheet resistance*2 types measuring tester (S version: Standard type, H version: High range resistivity measurement type)
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Semi-Automatic Probe Sheet Resistance/Resistivity Measurement
CRESBOX
• Multi-points measurement and Mapping display- 2-D map / 3-D map graphic display- Multipoint pattern measurement is programmed (maximum 1225 points) and random pattern is programmable by operator.• Film thickness conversion function from sheet resistance• Measurement data base link with Excel via CSV format file• Software language can be switched in English /Japanese by operator
