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SLM
detect, measure, and monitor power or the intensity of a signal.
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Compact Narrow Linewidth Laser
08-01 Series
*405 nm, 532 nm, 561 nm & 785 nm up to 500 mW*SLM diode pumped lasers (DPL) and narrow linewidth diode lasers (NLD)*Integrated optical isolator immune to optical feedback*Integrated spectral filter*Perfect for Raman, interferometry
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Diode Pumped Actively Q-switched Lasers
NL120 Series
NL120 series electro-optically Q-switched nanosecond Nd:YAG lasers provide up to 10 J per pulse with excellent stability. The innovative, diode‑pumped, self‑seeded master oscillator design results in Single Longitudinal Mode (SLM) output without the use of expensive narrow linewidth seed diodes and cavity‑locking electronics.
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R*evolution® Remote Plasma Source
The innovative R*evolution® Remote Plasma Source combines field-proven, low-field toroidal plasma technology with an actively cooled plasma chamber made of high purity quartz, significantly reducing oxygen, hydrogen and nitrogen atomic gas loss through wall recombination. Self-contained and compact, R*evolution delivers up to 10 slm of oxygen radicals from a 6kW power supply with true power accuracy of <1% resulting in a high density, extremely clean radical source for photoresist strip and an optimal clean rate greater than 12 microns/min-1. R*evolution can be used for other surface preparation applications.
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Spatial Light Modulators
Spatial Light Modulators (SLM) are used as adaptive optical elements that modulates light spatially in amplitude or phase. We offer devices that are based on either reflective (LCOS) or translucent (LCD) liquid crystal microdisplays.
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Fluorescence Spectroscopy
HORIBA’s Fluorescence division incorporates technology from SPEX, IBH, Jobin-Yvon, PTI and SLM - the dominant names in Fluorescence Spectroscopy. We offer the widest range of Steady State Fluorescence spectrometers, Fluorescence Lifetime spectrometers, Steady State and Lifetime Multi instruments and Microscope-based Microscopy solutions.
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Mass Flow Controller
SEC-E Series
This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.
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Compact Baking System
LSC series
HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
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Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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High Flow Mass Flow Controllers
High flow thermal mass flow controllers and meters offer both elastomer and metal seals for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required.
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Fast Response Flow Controller for Medium Flow
HFM-305 / HFC-307
The HFM-305/HFC-307 is Teledyne Hastings' fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen for its fast response under a wide range of conditions. .The HFM-305 / HFC-307 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured to have either normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-305 / HFC-307 services a wide variety of applications. Cleaning for oxygen service is available.
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Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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product
Fast Response Flow Controller for Medium Flow
HFM-305 / HFC-307
The HFM-305/HFC-307 is Teledyne Hastings' fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen for its fast response under a wide range of conditions.The HFM-305 / HFC-307 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured to have either normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-305 / HFC-307 services a wide variety of applications. Cleaning for oxygen service is available.
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product
Mass Flow Controller for Medium Flow
HFM-205 / HFC-207
The HFM-205/HFC-207, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-205 / HFC-207 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a full complement of fitting and elastomer options, the HFM-205/ HFC-207 covers a wide range of high flow applications.
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Fast Response Flow Controller for Medium Flow
HFM-301 / HFC-303
The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.
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product
Mass Flow Controller for Medium Flow
HFM-205 / HFC-207
The HFM-205/HFC-207, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-205 / HFC-207 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a full complement of fitting and elastomer options, the HFM-205/ HFC-207 covers a wide range of high flow applications.
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product
Fast Response Flow Controller for Medium Flow
HFM-301 / HFC-303
The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.
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product
Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
