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Probe Stations
system to contact DUTs to drive and receive signals.
See Also: Probe Systems, Flying Probes, Manual Probe Stations, Cryogenic Probe Systems
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Probe Station
S-1160
S-1160 Probe Station 100mm, 150mm and 200mm wafer stage's completely manual and user friendly.
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Probe Stations
PSI's 600LS Series Probe Station is designed to exceed performance metrics of equipment priced significantly higher.
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Probe Station
EPS500
Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided. - Maximum 6pcs of manipulators can be installed on the base unit of probe station EPS500.
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Probe Station
EPS1000
Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided. - Maximum pcs of manipulators can be installed on the base unit of probe
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Probe Station
DARK BOX
Size : 750 × 660 × 660 mm - Material : Steel - We can provide various dark box in size and shape at reasonable price as per customer requirements.And we also provide “integral sphere” with probe station as below.
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Probe Station
EPS300
Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided.
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Probe Station
ETCP1000
Installation of “Hot and cool chuck” - Sellectable chuck size : 4inch, 6inch. - Temperature variation : -193°C ~ 300°C (80K ~ 573K) - Additional requirements : Vacuum chamber, LN2 tank(Bombei), microscope, CCD camera, manipulators. - EPS500 is standard model in ETCP1000 probe station.
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Cryogenic Probe Station
CryoPro
Materials Development Corporation
The MDC Model 441 Cryogenic Probe Station is a cost effective alternative to high-priced vacuum based cryogenic probe stations. With up to five probes available and sample diameters up to six inches, the MDC Cryogenic Probe Station allows for electrical measurements at temperatures near liquid nitrogen levels (77K).
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Cryogenic Probe Station
EMPX-HF
The Lake Shore EMPX-H2 probe station enhances standard probe station capabilities with the addition of a ±0.6 T horizontal field electromagnet. All standard C-V, I-V, microwave, and electro-optical probing, plus in-plane horizontal field electromagnetic measurements can be performed on this versatile station. Researchers can use it for testing magneto-transport parameters. The EMPX‑H2 is Lake Shore’s premier probe station for vector-dependent magneto-transport measurements.
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Cryogenic Probe Station
CPX-VF
The Lake Shore CPX-VF probe station enhances the standard probe station capabilities with the addition of a ±2.5 T vertical field superconducting magnet. It can do all the standard C-V, I-V, microwave, and electro-optical probing of the CPX, plus out-of-plane vertical field superconducting magnetic measurements. Researchers can use it to perform Hall effect measurements and test magneto-transport parameters. The CPX-VF is one of Lake Shore’s premium probe stations for combining microwave measurements with magnetic field.
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Semi-Automatic Probe Station
P300A
The P300A probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing.
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Semi-Automated Probe Stations
SPS 2600, SPS 2800, and SPS 12000 Series
The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.
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Cryogenic Probe Station
TTPX
The TTPX probe station is an affordable, entry-level probe station capable of making a wide variety of non-destructive, standard electrical device measurements. The compact tabletop design is perfect for academic and laboratory research settings. The TTPX provides efficient cryogenic temperature operation and control with a continuous refrigeration system using either liquid helium or liquid nitrogen.
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Cryogenic Probe Station
FWPX
Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general-purpose probe station is designed for researchers or engineers conducting material characterization tests over large samples. It is also an effective unit for measuring organic materials.
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MmW Probe Station
EB-6V
The EB-6V probe station is designed for all frequency extenders such as those from VDI, OML, R&S, Keysight, Anritsu. If you are using an Anritsu VNA VectorStar ME7838A4 model, or commonly Anritsu 3743A mmW Extenders and related sizes, the station of interest is the EB-6A.
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Mini Probe Station
C-2
The smallest probe station which still preserves the key functions and precision that are fundamental to all probing. This size is still capable of DC and RF measurements, making it the most versatile in its size.
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Cryogenic Probe Station
CRX-4K
Designed for versatility and high performance, the CRX-4K is our premium cryogen-free closed-cycle refrigerant probe station. This system is the solution for those looking for the convenience of cryogen-free operation and the exceptional measurement performance of a Lake Shore product.
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Complete Probe Station
BD Series
Best for DC and RF probing, the platen lift is designed for smooth raise and contact of your probes simultaneously to your device. It is ideal for probing multiple spots on your device, or through multiple devices.
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Enhanced Probe Station
EB Series
Comprehensive prober for DC and RF. The EB series contains features to step-up your usability to acquire the accurate data you need from your devices. It has a built in probe card slot.
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Starter Probe Station
C Series
Contains fundamental features to probing. C series lets you kick off your experiments and is an entry level machine designed for ease of use while allowing you to get accurate, reliable results.
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Technical Manual Probe Station
4060 150-200 mm
Micromanipulator's Tech Series Probe Station, Model 4060 is designed to provide a quality 6-inch (150mm) or 8-inch (200mm) probe station at a cost effective price
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Semi-automatic 150mm Probe Station
CM460
CM460 Semi-automatic 150mm probe station step & repeat, point & shoot, color mapping, and complete software control.
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Controlled Environment Probe Station
CG-196
Everbeing controlled environment probe station allows vacuum and cryogenic probing down to 77K with liquid nitrogen or high temperature probing up to 1273K. Efficient in characterizing your devices at extreme temperatures, vacuum, specific gas, etc.
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Portable Wafer Probe Station
PS-5026B
High Power Pulse Instruments GmbH
The PS-5026B is a rugged portable wafer probing solution which has been designed for high reliability, compact size and minimum cost.
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Standard Probe Station Chucks & Accessories
In this test solutions section of our website we describe the expanding line of Abet PV IV probe stations for the growing variety of solar cell types and sizes being developed around the world. This page describes a line of vacuum chucks and accessories for top/bottom, top/top, and bottom/bottom solar cells from 3 x 3 mm to 300 x 300 mm. Probe stations for multiple device on a single substrate and multifunction probe stations are described further in the sections highlighted to the left of this page.
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Automated Probe Stations 200 - 300mm
P200L or P300L
The Micromanipulator P300L 300mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P300L features leadscrew – leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.The P300L ‘s versatile controller supports USB and GPIB communications (configured with proper options). The stage X-Y and platen (Z) are motorized / programmable. Microscope motorized / programmable control is also an option. The system may be controlled via scripts and all popular parametric test analytical prober drivers. An indexing script with user GUI and a Labview VI is provided allowing use of the system right out of the box.Micromanipulator strives to ensure our semiautomatic systems are flexible so that applications like Magnetic sensitivity testing, Probe cards, mmW, Wafer & Board level testing. Once you have developed your testing plan we also have great relationships so we can move you into a fully automatic probe station if needed.Joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage, platen, and microscope for systems so configured.The P300L may be configured with a local dry / shielded / dark environment “Top Hat” for low level or low temperature, frost free probing. Three temperature ranges are supported:Ambient (room temperature) to 300C0C to 300C-55C to 300CThe P300L is the station of choice for a high performance, full capability and cost-effective 300 mm semi-automatic probe station.
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Analytical Probe Station with Laser Cutting System
LCS- 4000 Series
The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions can be performed on a microscopic level, all on this one system which provides a high level of performance that is remarkably easy to use.
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Sealing Kit for PHD-4001A on Cascade Elite E300, Octagon CM300 Probe Station
PHD-4001-TH-Seal
High Power Pulse Instruments GmbH
*Sealing Kit for PHD-PPM10-H9 and PHD-4001A on Cascade Octagon CM300 probe station*High temperature range -40 °C to +200 °C
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Probe Systems
These flexible probe stations are designed for the ever-changing test configurations required in a engineering lab. Combined with durable probes or your own high-speed probes, PacketMicro probe stations are the most cost-effective probing solutions in the industry.
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Lab Assistant
The SemiProbe Lab Assistant family of probe stations is specifically designed to address the requirements of universities and research personnel. Lab Assistant probe stations provide simplicity, ease of operation, portability, affordability and modularity. Lab Assistant probe stations can be configured for DC or HF/Microwave testing configurations, including an array of sophisticated accessories that are usually only found on much larger, more expensive probing stations.
