![Virtual Interface Technology for 3D-IC Metrology](https://d27wgn5g4t3wja.cloudfront.net/img/33813189-962c-663d-44e5-330ab52aab65/234389.png)
Virtual Interface Technology for 3D-IC Metrology
VIT - Frontier Semiconductor, Inc, (FSM)
TSV profile (depth, top & bottom CD, tilt, SWA)-Residue Detection-RST-Copper Nail Height-Bump Height and Cu pillar height-Edge trim profile
VIT - Frontier Semiconductor, Inc, (FSM)
TSV profile (depth, top & bottom CD, tilt, SWA)-Residue Detection-RST-Copper Nail Height-Bump Height and Cu pillar height-Edge trim profile