Multi-Channel Ozone Delivery System With In-rack Chiller

SEMOZON® AX8575 - MKS Instruments

The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.