Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Thin Film Circuits
SemiGen offers build-to-print services for a wide range of materials and metallization schemes. We use our processing technology to fabricate circuits on As-Fired Alumina, Polished Alumina, Superstrate TPS, Aluminum Nitride, Beryllium Oxide, Fused Silica/Quartz, Sapphire, and Hi-K Dielectrics.
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Thin Film Analyser
TFA
The TFA instrument has be designed to monitor dissolution rates with a minimal volume of developer, typically ≤ 1 ml. The design uses surface tension to hold the developer in a small gap between the sample and the detector head. The instrument allows multiple measurements on the same sample. Thickness measurement can be made in the same geometry as dissolution measurements.
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Thin Film Design Software
Scientific Computing International
SCI offers software tools for optical thin film design, material analysis, ellipsometry, and spectrophotometry. SCI’s current standalone optical thin film software includes:
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Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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Thin Film Based Thermopile Detector: 10 Channels
10 Channel
A ten-channel thin-film thermopile in a TO-8 package. Each active area is 3.16mm x 0.4mm and offers low noise voltage. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Thin Film Based Thermopile Detector: 3 Channels
TM34
A three-channel thin-film thermopile in a TO-8 package. Each symmetrically positioned active area is 3.16mm x 0.4mm. Offers low noise output and internal aperture minimizing channel-to-channel crosstalk while increasing sensitivity.
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In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Thin Film Chip Resistors, High Reliability Type
Panasonic Industrial Devices Sales Company of America
An AEC-Q200 Compliant SeriesPanasonic components specified as AEC-Q200 Compliant are consistently designed into automotive systems. However, today’s Design Engineers are specifying AEC-Q200 components to meet the high-quality standards of devices beyond automotive applications.
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Thin-film deposition
Plasma Source
SPECS Surface Nano Analysis GmbH
Thin-film deposition covers any technique for depositing material onto a bulk or thin film substrate. Elemental alloy or compound films are produced by non-reactive or reactive (co-)deposition. Often functionalization or tailoring of device interfaces by predeposition or deposition assisting surface treatment with atoms or ions is necessary.
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Scatterometer with Thin Film Measurement Capabilities
OptiPrime-X Series
The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Spectroscopic Ellisopmeter for Simple Thin Film Measurement
Auto SE
The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.
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Thin Film SPY Inspection w/ Built In Jeep Meter
780
For thin film coatings the easy-carry and easy to handle SPY Model 780 speeds inspection time with its built in Jeep meter and various other time saving and comfort features.
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Reference Ellipsometer for Thin Film Measurements
UVISEL Plus
The UVISEL Plus ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution. The possibility to continuously adjust the spectral resolution along the measurement range enables to scan a sample smarter and faster.
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Thin Film
Bourns precision thin film resistors have tight resistance tolerances, extremely low temperature coefficiency and wide range of resistance value which makes them ideal for high precision applications. Excellent stability, low noise characteristics are achieved by using thin film sputtering technology on ceramic substrates and high precision laser trimming process.
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Compact Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000C
*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts
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Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000L
*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts*Target: Electric crosshair on monitor
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Thin Film Based Thermopile Detector: 4 Channels
2M Quad
A four-channel thin-film thermopile in a TO-8 package. Each active area is 2mm x 2mm. Offers the world's highest 4-channel sensitivity with exceptional signal-to-noise performance in a TO-8 package. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Spectroscopic Ellipsometer
PH-SE
The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
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Deposition Systems
When a thin film requires the most stringent structural or compositional properties consistently across every layer, Veeco’s Ion Beam Deposition (IBD) technology is often the answer. Using a focused beam of ions to sputter material from a target, this physical vapor deposition technique builds dense, uniform films with standout adhesion and stability.
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Reflection/Transmission Spectrophotometry
FilmTek 3000 PAR-SE
Scientific Computing International
Engineered to meet the needs of any advanced thin film measurement application, excelling at material characterization on both transparent and non-transparent substrates. Combines spectroscopic ellipsometry, DUV multi-angle polarized reflectometry, and transmission measurement with a wide spectral range to meet the most challenging of measurement demands in both R&D and production. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Audio Line Drivers and Receivers
Analog Devices audio line driver and receiver solutions feature differential-output buffer amplifiers and differential input buffer amplifiers to support a wide range of applications. By using low noise thermally matched thin film resistors and high slew rate amplifiers, these parts maintain the sonic quality of audio systems by eliminating power line hum, RF interference, voltage drops, and other externally generated noise commonly encountered with long audio cable runs. Applications involving this product portfolio include ADC drivers, high performance audio, sine/cosine encoders, and other professional and consumer uses.
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Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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Quartz Crystal Microbalance
QCM200
Stanford Research Systems, Inc.
The QCM200 Quartz Crystal Microbalance measures mass and viscosity in processes occurring at or near surfaces, or within thin films. This system includes a controller, crystal oscillator electronics, crystal holder, three quartz crystals, and Windows / Mac software.
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C-Band 1510nm BWDM
WD1510
Hangzhou Huatai Optic Tech. Co., Ltd.
WD1510 WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to WDM network to achieve the combination and separation of C-Band 1510nm (±10nm, monitor and control channel).
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Metrology System
IMPULSE V
With tighter wafer-to-wafer and within-wafer uniformity tolerances, integrated metrology systems are in use across various semiconductor processing steps. Based on demonstrated high-resolution optical technology, the IMPULSE V system provides higher sensitivity to thin film residue measurements during the CMP process. The IMPULSE platform boasts the industry’s most reliable hardware with best-in-class reliability and productivity metrics.
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Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
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DC Power Source Systems
Looking for a proven, precise DC power source? Advanced Energy offers standard DC and pulsed-DC power-delivery options. Thanks to vast feature sets and reliable performance, our DC power generators are used in nearly every manufacturing market — semiconductor, flat panel, glass, thin film, etc. And via our global, dedicated support staff, we make sure you get the right DC power product for your processes and applications.
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Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
